High-Q MEMS Resonators for Laser Beam Scanning Displays

High-Q MEMS Resonators for Laser Beam Scanning Displays

This paper reports on design, fabrication and characterization of high-Q MEMS resonators to be used in optical applications like laser displays and LIDAR range sensors. Stacked vertical comb drives for electrostatic actuation of single-axis scanners and biaxial MEMS mirrors were realized in a dual l...

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Bibliographic Details
Main Authors: Ulrich Hofmann, Hans-Joachim Quenzer, Joachim Janes
Format: Article
Language:English
Published: MDPI AG 2012-06-01
Series:Micromachines
Subjects:
MEMS mirror
vacuum package
laser projection
laser display
HD-resolution
Online Access:http://www.mdpi.com/2072-666X/3/2/509

Internet

http://www.mdpi.com/2072-666X/3/2/509

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