Overview of 3D Micro- and Nanocoordinate Metrology at PTB

Overview of 3D Micro- and Nanocoordinate Metrology at PTB

Improved metrological capabilities for three-dimensional (3D) measurements of various complex micro- and nanoparts are increasingly in demand. This paper gives an overview of the research activities carried out by the Physikalisch-Technische Bundesanstalt (PTB), the national metrology institute of G...

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Bibliographic Details
Main Authors: Gaoliang Dai, Michael Neugebauer, Martin Stein, Sebastian Bütefisch, Ulrich Neuschaefer-Rube
Format: Article
Language:English
Published: MDPI AG 2016-09-01
Series:Applied Sciences
Subjects:
micro-coordinate measuring machine (micro-CMM)
3D coordinate metrology
microparts
traceability
calibration
CMM probe
physical standards
microhole
microgear
contour
Online Access:http://www.mdpi.com/2076-3417/6/9/257

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http://www.mdpi.com/2076-3417/6/9/257

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