On-Chip Sensing of Thermoelectric Thin Film’s Merit
Thermoelectric thin films have been widely explored for thermal-to-electrical energy conversion or solid-state cooling, because they can remove heat from integrated circuit (IC) chips or micro-electromechanical systems (MEMS) devices without involving any moving mechanical parts. In this paper, we r...
Main Authors: | , |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2015-07-01
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Series: | Sensors |
Subjects: | |
Online Access: | http://www.mdpi.com/1424-8220/15/7/17232 |