Control Effect of Nanometer SiO2 Hydrosol on Alloy Impurity in CMP Process of ULSI
| Main Authors: | , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
Hindawi Limited
2006-01-01
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| Series: | Journal of Nanomaterials |
| Online Access: | http://dx.doi.org/10.1155/JNM/2006/29139 |