Tuning the Anti-Phase Mode Sensitivity to Vibrations of a MEMS Gyroscope

Tuning the Anti-Phase Mode Sensitivity to Vibrations of a MEMS Gyroscope

This paper proposes a stiffness correction method to improve the resilience to vibration of a dual-mass MEMS gyroscope with a particular focus near the resonance frequency of the anti-phase drive mode (fDa), i.e., its operational mode. Because of its balanced shape, this operating mode is ideally in...

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Bibliographic Details
Main Authors: Pierre Janioud, Alexandra Koumela, Christophe Poulain, Patrice Rey, Audrey Berthelot, Panagiota Morfouli, Guillaume Jourdan
Format: Article
Language:English
Published: MDPI AG 2017-08-01
Series:Proceedings
Subjects:
MEMS
gyroscope
anti-phase mode
mechanical vibration
stiffness correction
Online Access:https://www.mdpi.com/2504-3900/1/4/355

Internet

https://www.mdpi.com/2504-3900/1/4/355

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