A CMOS Pressure Sensor Tag Chip for Passive Wireless Applications

A CMOS Pressure Sensor Tag Chip for Passive Wireless Applications

This paper presents a novel monolithic pressure sensor tag for passive wireless applications. The proposed pressure sensor tag is based on an ultra-high frequency RFID system. The pressure sensor element is implemented in the 0.18 µm CMOS process and the membrane gap is formed by sacrificial layer r...

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Bibliographic Details
Main Authors: Fangming Deng, Yigang He, Bing Li, Lei Zuo, Xiang Wu, Zhihui Fu
Format: Article
Language:English
Published: MDPI AG 2015-03-01
Series:Sensors
Subjects:
pressure sensor
RFID technology
CMOS process
capacitive sensor interface
rectifier
Online Access:http://www.mdpi.com/1424-8220/15/3/6872

Internet

http://www.mdpi.com/1424-8220/15/3/6872

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