3D GaN nanoarchitecture for field-effect transistors

The three-dimensionality of 3D GaN field-effect transistors (FETs) provides them with unique advantages compared to their planar counterparts, introducing a promising path towards future FETs beyond Moore's law. Similar to today's Si processor technology, 3D GaN FETs offer multi-gate struc...

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Bibliographic Details
Main Authors: Muhammad Fahlesa Fatahilah, Klaas Strempel, Feng Yu, Sindhuri Vodapally, Andreas Waag, Hutomo Suryo Wasisto
Format: Article
Language:English
Published: Elsevier 2019-05-01
Series:Micro and Nano Engineering
Online Access:http://www.sciencedirect.com/science/article/pii/S259000721930019X