Virtual Fabrication of Silicon Nitride Based Multifunctional MEMS Pressure Sensor
This paper shows how to combine absolute and differential pressure sensor on single silicon substrate for measuring the pressure in 0 – 1 MPa range. In this work, the sensor makes use a of silicon nitride square diaphragm supported by a thick silicon rim. Piezoresistors below the diaphragms are defi...
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| Format: | Article |
| Language: | English |
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IFSA Publishing, S.L.
2011-04-01
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| Series: | Sensors & Transducers |
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| Online Access: | http://www.sensorsportal.com/HTML/DIGEST/april_2011/P_787.pdf |