Phase control and Young’s modulus of tungsten thin film prepared by dual ion beam sputtering deposition
In this letter, tungsten films of varying thickness from ∼20 nm to ∼80 nm were prepared at different deposition temperature by Dual ion beam sputtering deposition (DIBSD) method. The influence of thickness and deposition temperature on the films phase, microstructure and Young’s modulus was studied...
| Main Authors: | , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2018-03-01
|
| Series: | AIP Advances |
| Online Access: | http://dx.doi.org/10.1063/1.5021009 |