Assembled Cantilever Fiber Touch Trigger Probe for Three-Dimensional Measurement of Microstructures

In this paper, an assembled cantilever fiber touch trigger probe was developed for three-dimensional measurements of clear microstructures. The probe consists of a shaft assembled vertically to an optical fiber cantilever and a probing sphere located at the free end of the shaft. The laser is emitte...

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Bibliographic Details
Main Authors: Limin Zou, He Ni, Peng Zhang, Xuemei Ding
Format: Article
Language:English
Published: MDPI AG 2017-11-01
Series:Sensors
Subjects:
Online Access:https://www.mdpi.com/1424-8220/17/11/2652