Fabrication and characterization of PZT string based MEMS devices

Fabrication and characterization of PZT string based MEMS devices

String based MEMS devices recently attract world technology development thanks to their advantages over cantilever ones. Approaching to this direction, the paper reports on the micro-fabrication and characterization of free-standing doubly clamped piezoelectric beams based on heterostructures of Pd/...

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Bibliographic Details
Main Authors: D.T. Huong Giang, N.H. Duc, G. Agnus, T. Maroutian, P. Lecoeur
Format: Article
Language:English
Published: Elsevier 2016-06-01
Series:Journal of Science: Advanced Materials and Devices
Subjects:
Piezoelectric
Clamped–clamped beam
String based MEMS
C–V characteristics
Optical interferometer profiler
Quality factor
Online Access:http://www.sciencedirect.com/science/article/pii/S2468217916300466

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http://www.sciencedirect.com/science/article/pii/S2468217916300466

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