Fabrication and Characterization of PZT Fibered-Epitaxial Thin Film on Si for Piezoelectric Micromachined Ultrasound Transducer

Fabrication and Characterization of PZT Fibered-Epitaxial Thin Film on Si for Piezoelectric Micromachined Ultrasound Transducer

This paper presents a fibered-epitaxial lead zirconate titanate (PZT) thin film with intermediate features between the monocrystalline and polycrystalline thin films for piezoelectric micromachined ultrasound transducer (pMUT). The grain boundaries confirmed by scanning electron microscopy, but it s...

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Bibliographic Details
Main Authors: Pham Ngoc Thao, Shinya Yoshida, Shuji Tanaka
Format: Article
Language:English
Published: MDPI AG 2018-09-01
Series:Micromachines
Subjects:
piezoelectric materials
epitaxial thin film
micromachined ultrasound transducer (pMUT)
Online Access:http://www.mdpi.com/2072-666X/9/9/455

Internet

http://www.mdpi.com/2072-666X/9/9/455

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