Pulsed laser deposition of oxide thin films by the fifth harmonic of a Nd:Y3Al5O12 (Nd:YAG) laser

Pulsed laser deposition of oxide thin films by the fifth harmonic of a Nd:Y3Al5O12 (Nd:YAG) laser

We report the pulsed laser deposition (PLD) of anatase TiO2, LaAlO3, and La0.7Ca0.3MnO3 epitaxial thin films by a fifth-harmonic Nd:Y3Al5O12 (Nd:YAG) laser. High-quality anatase Ti0.996Nb0.004O2 epitaxial thin films were deposited and showed transparent conducting properties, with a maximum mobility...

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Bibliographic Details
Main Authors: Ryota Shimizu, Issei Sugiyama, Naoto Nakamura, Shigeru Kobayashi, Taro Hitosugi
Format: Article
Language:English
Published: AIP Publishing LLC 2018-09-01
Series:AIP Advances
Online Access:http://dx.doi.org/10.1063/1.5048441

Internet

http://dx.doi.org/10.1063/1.5048441

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