Pulsed laser deposition of oxide thin films by the fifth harmonic of a Nd:Y3Al5O12 (Nd:YAG) laser

Pulsed laser deposition of oxide thin films by the fifth harmonic of a Nd:Y3Al5O12 (Nd:YAG) laser

We report the pulsed laser deposition (PLD) of anatase TiO2, LaAlO3, and La0.7Ca0.3MnO3 epitaxial thin films by a fifth-harmonic Nd:Y3Al5O12 (Nd:YAG) laser. High-quality anatase Ti0.996Nb0.004O2 epitaxial thin films were deposited and showed transparent conducting properties, with a maximum mobility...

Full description

Bibliographic Details
Main Authors: Ryota Shimizu, Issei Sugiyama, Naoto Nakamura, Shigeru Kobayashi, Taro Hitosugi
Format: Article
Language:English
Published: AIP Publishing LLC 2018-09-01
Series:AIP Advances
Online Access:http://dx.doi.org/10.1063/1.5048441
id doaj-cfa6d09a7b0c496ca9f5c15aa41be2b9
record_format Article
spelling doaj-cfa6d09a7b0c496ca9f5c15aa41be2b92020-11-25T00:49:00ZengAIP Publishing LLCAIP Advances2158-32262018-09-0189095101095101-610.1063/1.5048441010809ADVPulsed laser deposition of oxide thin films by the fifth harmonic of a Nd:Y3Al5O12 (Nd:YAG) laserRyota Shimizu0Issei Sugiyama1Naoto Nakamura2Shigeru Kobayashi3Taro Hitosugi4School of Materials and Chemical Technology, Tokyo Institute of Technology, Tokyo 152-8552, JapanSchool of Materials and Chemical Technology, Tokyo Institute of Technology, Tokyo 152-8552, JapanSchool of Materials and Chemical Technology, Tokyo Institute of Technology, Tokyo 152-8552, JapanSchool of Materials and Chemical Technology, Tokyo Institute of Technology, Tokyo 152-8552, JapanSchool of Materials and Chemical Technology, Tokyo Institute of Technology, Tokyo 152-8552, JapanWe report the pulsed laser deposition (PLD) of anatase TiO2, LaAlO3, and La0.7Ca0.3MnO3 epitaxial thin films by a fifth-harmonic Nd:Y3Al5O12 (Nd:YAG) laser. High-quality anatase Ti0.996Nb0.004O2 epitaxial thin films were deposited and showed transparent conducting properties, with a maximum mobility of 94 cm2V−1s−1 at 80 K. These results are consistent with those obtained for films deposited by excimer lasers. Furthermore, we report the deposition of droplet-free flat LaAlO3 and La0.7Ca0.3MnO3 films. The latter films exhibited an insulator-to-metal transition at ∼240 K, accompanied by a large magnetoresistive effect, in agreement with previous studies using excimer lasers. These results indicate that the fifth harmonic of a Nd:YAG laser may be a potential alternative to excimer lasers for PLD.http://dx.doi.org/10.1063/1.5048441
collection DOAJ
language English
format Article
sources DOAJ
author Ryota Shimizu
Issei Sugiyama
Naoto Nakamura
Shigeru Kobayashi
Taro Hitosugi
spellingShingle Ryota Shimizu
Issei Sugiyama
Naoto Nakamura
Shigeru Kobayashi
Taro Hitosugi
Pulsed laser deposition of oxide thin films by the fifth harmonic of a Nd:Y3Al5O12 (Nd:YAG) laser
AIP Advances
author_facet Ryota Shimizu
Issei Sugiyama
Naoto Nakamura
Shigeru Kobayashi
Taro Hitosugi
author_sort Ryota Shimizu
title Pulsed laser deposition of oxide thin films by the fifth harmonic of a Nd:Y3Al5O12 (Nd:YAG) laser
title_short Pulsed laser deposition of oxide thin films by the fifth harmonic of a Nd:Y3Al5O12 (Nd:YAG) laser
title_full Pulsed laser deposition of oxide thin films by the fifth harmonic of a Nd:Y3Al5O12 (Nd:YAG) laser
title_fullStr Pulsed laser deposition of oxide thin films by the fifth harmonic of a Nd:Y3Al5O12 (Nd:YAG) laser
title_full_unstemmed Pulsed laser deposition of oxide thin films by the fifth harmonic of a Nd:Y3Al5O12 (Nd:YAG) laser
title_sort pulsed laser deposition of oxide thin films by the fifth harmonic of a nd:y3al5o12 (nd:yag) laser
publisher AIP Publishing LLC
series AIP Advances
issn 2158-3226
publishDate 2018-09-01
description We report the pulsed laser deposition (PLD) of anatase TiO2, LaAlO3, and La0.7Ca0.3MnO3 epitaxial thin films by a fifth-harmonic Nd:Y3Al5O12 (Nd:YAG) laser. High-quality anatase Ti0.996Nb0.004O2 epitaxial thin films were deposited and showed transparent conducting properties, with a maximum mobility of 94 cm2V−1s−1 at 80 K. These results are consistent with those obtained for films deposited by excimer lasers. Furthermore, we report the deposition of droplet-free flat LaAlO3 and La0.7Ca0.3MnO3 films. The latter films exhibited an insulator-to-metal transition at ∼240 K, accompanied by a large magnetoresistive effect, in agreement with previous studies using excimer lasers. These results indicate that the fifth harmonic of a Nd:YAG laser may be a potential alternative to excimer lasers for PLD.
url http://dx.doi.org/10.1063/1.5048441
work_keys_str_mv AT ryotashimizu pulsedlaserdepositionofoxidethinfilmsbythefifthharmonicofandy3al5o12ndyaglaser
AT isseisugiyama pulsedlaserdepositionofoxidethinfilmsbythefifthharmonicofandy3al5o12ndyaglaser
AT naotonakamura pulsedlaserdepositionofoxidethinfilmsbythefifthharmonicofandy3al5o12ndyaglaser
AT shigerukobayashi pulsedlaserdepositionofoxidethinfilmsbythefifthharmonicofandy3al5o12ndyaglaser
AT tarohitosugi pulsedlaserdepositionofoxidethinfilmsbythefifthharmonicofandy3al5o12ndyaglaser
_version_ 1725253680807018496

Similar Items