Collapse Mode Characteristics of Parallel Plate Ultrasonic Transducer Radiating in Air and Water
A 2D finite element analysis of capacitive micromachined ultrasonic transducer (CMUT) is proposed taking into account radiation in air and water. Different CMUT element geometries circular, square and hexagonal have been considered for FEM simulations. FEM simulation software COMSOL is employed to...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
IFSA Publishing, S.L.
2016-01-01
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| Series: | Sensors & Transducers |
| Subjects: | |
| Online Access: | http://www.sensorsportal.com/HTML/DIGEST/january_2016/Vol_196/P_2788.pdf |