Influence of carbon on microstructure and mechanical properties of magnetron sputtered TaW coatings

(Ta,W) and (Ta,W):C films with ~5 at.% C were deposited by non-reactive magnetron sputtering. They crystallised in a bcc structure with a columnar microstructure. The solid solubility of C in (Ta,W) alloys is very low, which suggests that the (Ta,W):C films are supersaturated with respect to carbon....

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Bibliographic Details
Main Authors: S. Fritze, M. Hans, L. Riekehr, B. Osinger, E. Lewin, J.M. Schneider, U. Jansson
Format: Article
Language:English
Published: Elsevier 2020-11-01
Series:Materials & Design
Subjects:
Online Access:http://www.sciencedirect.com/science/article/pii/S0264127520306055