RF magnetron sputter deposition and electrical properties of La and Y doped SrTiO3 epitaxial films
La and Y doped SrTiO3 (STO) thin films were grown on (100) oriented pure STO single crystal substrates by the RF magnetron sputter technique. The La/Y doped layer is intended for use as bottom electrode for epitaxial growth of various functional oxide films. The results showed that one of the crucia...
| Main Authors: | , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
Elsevier
2019-10-01
|
| Series: | Materials & Design |
| Online Access: | http://www.sciencedirect.com/science/article/pii/S0264127519303260 |