Wide Spectral Characteristics of Si Photonic Crystal Mach-Zehnder Modulator Fabricated by Complementary Metal-Oxide-Semiconductor Process

Wide Spectral Characteristics of Si Photonic Crystal Mach-Zehnder Modulator Fabricated by Complementary Metal-Oxide-Semiconductor Process

Optical modulators for optical interconnects require a small size, small voltage, high speed and wide working spectrum. For this purpose, we developed Si slow-light Mach-Zehnder modulators via a 180 nm complementary metal-oxide-semiconductor process. We employed 200 μm lattice-shifted photonic cryst...

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Bibliographic Details
Main Authors: Yosuke Hinakura, Yosuke Terada, Takuya Tamura, Toshihiko Baba
Format: Article
Language:English
Published: MDPI AG 2016-04-01
Series:Photonics
Subjects:
silicon photonics
optical interconnect
photonic crystal
optical modulator
silicon modulator
Mach-Zehnder modulator
Online Access:http://www.mdpi.com/2304-6732/3/2/17

Internet

http://www.mdpi.com/2304-6732/3/2/17

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