All-digital PLL System for Self-oscillation Mode of Microcantilevers with Integrated Bimorph Actuator and Piezoresistive Readout
Self-oscillation system for microcantilevers with integrated actuator and piezoresistive read-out has been newly developed. The presented concept uses Phase Locked Loop approach which forces the system to lock at resonance frequency of the microcantilever sensors and to follow its changes. The syste...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
IFSA Publishing, S.L.
2008-11-01
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| Series: | Sensors & Transducers |
| Subjects: | |
| Online Access: | http://www.sensorsportal.com/HTML/DIGEST/november_08/P_350.pdf |