STUDY OF LEUKOSAPPHIRE SURFACE MORPHOLOGY CHANGE BY ARGON ION BEAM AT SMALL GRAZING ANGLE

STUDY OF LEUKOSAPPHIRE SURFACE MORPHOLOGY CHANGE BY ARGON ION BEAM AT SMALL GRAZING ANGLE

Subject of Research. The paper presents the results of experimental study on the specific features of argon ion beam effect on a sapphire surface at small grazing angles. Mechanically ground and defective epipolished leucosapphire plates with 20 × 20 × 1.2 mm in size were used as experimental samp...

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Bibliographic Details
Main Authors: Oleg V. Devitsky, Olesya G. Dmitrieva, Dmitry A. Nikulin, Ivan V. Kasyanov, Igor A. Sysoev
Format: Article
Language:English
Published: Saint Petersburg National Research University of Information Technologies, Mechanics and Optics (ITMO University) 2019-10-01
Series:Naučno-tehničeskij Vestnik Informacionnyh Tehnologij, Mehaniki i Optiki
Subjects:
ion-beam treatment
sapphire surface roughness
ion-beam polishing
Online Access:https://ntv.ifmo.ru/file/article/18962.pdf/

Internet

https://ntv.ifmo.ru/file/article/18962.pdf/

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