Hybrid Micro Electro Mechanical Sensor based onGraphene Oxide/Polyvinyl Alcohol for Humidity Measurements
In this paper, we present a redundant micromachined sensor based on Bulk and Etch. <b>Silicon-on-Insulator </b>(BESOI) process for measurements of relative humidity (RH) by using Graphene-Oxide/Polyvinyl-Alcohol (GO/PVA) composite. The microsensor is a mechanical oscillator composed of a...
Main Authors: | , , , |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2018-12-01
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Series: | Proceedings |
Subjects: | |
Online Access: | https://www.mdpi.com/2504-3900/2/13/1011 |