Hybrid Micro Electro Mechanical Sensor based onGraphene Oxide/Polyvinyl Alcohol for Humidity Measurements

Hybrid Micro Electro Mechanical Sensor based onGraphene Oxide/Polyvinyl Alcohol for Humidity Measurements

In this paper, we present a redundant micromachined sensor based on Bulk and Etch. <b>Silicon-on-Insulator </b>(BESOI) process for measurements of relative humidity (RH) by using Graphene-Oxide/Polyvinyl-Alcohol (GO/PVA) composite. The microsensor is a mechanical oscillator composed of a...

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Bibliographic Details
Main Authors:	Carlo Trigona, Ammar Al-Hamry, Olfa Kanoun, Salvatore Baglio
Format:	Article
Language:	English
Published:	MDPI AG 2018-12-01
Series:	Proceedings
Subjects:	redundant measurements hybrid sensor nanomaterial GO/PVA composite humidity sensor micromachined sensor
Online Access:	https://www.mdpi.com/2504-3900/2/13/1011

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