Coupled Investigation of Contact Potential and Microstructure Evolution of Ultra-Thin AlO<sub>x</sub> for Crystalline Si Passivation
In this work, we report the same trends for the contact potential difference measured by Kelvin probe force microscopy and the effective carrier lifetime on crystalline silicon (c-Si) wafers passivated by AlO<sub>x</sub> layers of different thicknesses and submitted to annealing under va...
Main Authors: | Zhen Zheng, Junyang An, Ruiling Gong, Yuheng Zeng, Jichun Ye, Linwei Yu, Ileana Florea, Pere Roca i Cabarrocas, Wanghua Chen |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2021-07-01
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Series: | Nanomaterials |
Subjects: | |
Online Access: | https://www.mdpi.com/2079-4991/11/7/1803 |
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