Investigation of Metrological Performance of the ISFET-Based pH Sensors
The metrological performance characteristics of the dual channel p-type ISFET pH sensors with silicon nitride sensitive layer are investigated. The simplified three-lead sensor design and corresponding signal readout circuit are employed and the sensor transform function is evaluated as dependency o...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
IFSA Publishing, S.L.
2014-05-01
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| Series: | Sensors & Transducers |
| Subjects: | |
| Online Access: | http://www.sensorsportal.com/HTML/DIGEST/may_2014/Special_issue/P_SI_506.pdf |