Determination of Optical Properties in Germanium Carbon Coatings Deposited by Plasma Enhanced Chemical Vapor Deposition
In this research, Germanium-carbon coatings were deposited on ZnS substrates by plasma enhanced chemical vapor deposition (PECVD) using GeH4 and CH4 precursors. Optical parameters of the Ge1-xCx coating such as refractive index, Absorption coefficient, extinction coefficient and band gap were measur...
Main Authors: | , , , |
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Format: | Article |
Language: | English |
Published: |
Iran University of Science & Technology
2018-03-01
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Series: | Iranian Journal of Materials Science and Engineering |
Subjects: | |
Online Access: | http://ijmse.iust.ac.ir/browse.php?a_code=A-10-1448-1&slc_lang=en&sid=1 |