Silicon Heterojunction Solar Cells with p-Type Silicon Carbon Window Layer

Boron-doped hydrogenated amorphous silicon carbide (a-SiC:H) thin films are deposited using high frequency 27.12 MHz plasma enhanced chemical vapor deposition system as a window layer of silicon heterojunction (SHJ) solar cells. The CH<sub>4</sub> gas flow rate is varied to deposit vario...

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Bibliographic Details
Main Authors: Chia-Hsun Hsu, Xiao-Ying Zhang, Ming Jie Zhao, Hai-Jun Lin, Wen-Zhang Zhu, Shui-Yang Lien
Format: Article
Language:English
Published: MDPI AG 2019-08-01
Series:Crystals
Subjects:
Online Access:https://www.mdpi.com/2073-4352/9/8/402