Microelectromechanical System-Based Electrochemical Seismometers with Two Pairs of Electrodes Integrated on One Chip

Microelectromechanical System-Based Electrochemical Seismometers with Two Pairs of Electrodes Integrated on One Chip

This paper presents microelectromechanical system (MEMS)-based electrochemical seismometers with two pairs of electrodes integrated on one chip. Both theoretical analysis and numerical simulations were conducted to reveal the working principle of the proposed electrochemical seismometers, finding th...

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Bibliographic Details
Main Authors: Xichen Zheng, Deyong Chen, Junbo Wang, Jian Chen, Chao Xu, Wenjie Qi, Bowen Liu
Format: Article
Language:English
Published: MDPI AG 2019-09-01
Series:Sensors
Subjects:
microelectromechanical system
electrochemical seismometer
integrated sensing unit
high sensitivity
high fabrication repeatability
Online Access:https://www.mdpi.com/1424-8220/19/18/3953

Internet

https://www.mdpi.com/1424-8220/19/18/3953

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