Stability Analysis of a Proximate Time Optimal Controlled Electrostatic Suspension System Using Piezo Actuator via Lyapunov Functional Approach
An electrostatic suspension of silicon wafer using proximate time optimal control has been successfully developed. In this system, the movable electrodes which are supplied by constant voltage and actuated by the piezoelectric (PZT) actuator are used instead of stationary electrodes like previous sy...
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| Format: | Article |
| Language: | English |
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Hindawi Limited
2020-01-01
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| Series: | Mathematical Problems in Engineering |
| Online Access: | http://dx.doi.org/10.1155/2020/9516476 |