Analysis of surface properties of Ti-Cu-Ox gradient thin films using AFM and XPS investigations

Analysis of surface properties of Ti-Cu-Ox gradient thin films using AFM and XPS investigations

The paper presents results of investigations on surface properties of transparent semiconducting thin films based on (Ti-Cu)oxide system prepared using multi-magnetron sputtering system. The thin films were prepared using two programmed profiles of pulse width modulation coefficient, so called V- an...

Full description

Bibliographic Details
Main Authors: Kotwica Tomasz, Domaradzki Jaroslaw, Wojcieszak Damian, Sikora Andrzej, Kot Malgorzata, Schmeisser Dieter
Format: Article
Language:English
Published: Sciendo 2018-12-01
Series:Materials Science-Poland
Subjects:
surface
gradient distribution
thin film oxide
Online Access:http://www.degruyter.com/view/j/msp.2018.36.issue-4/msp-2018-0100/msp-2018-0100.xml?format=INT

Internet

http://www.degruyter.com/view/j/msp.2018.36.issue-4/msp-2018-0100/msp-2018-0100.xml?format=INT

Similar Items