Modeling and Manufacturing of a Micromachined Magnetic Sensor Using the CMOS Process without Any Post-Process

Modeling and Manufacturing of a Micromachined Magnetic Sensor Using the CMOS Process without Any Post-Process

The modeling and fabrication of a magnetic microsensor based on a magneto-transistor were presented. The magnetic sensor is fabricated by the commercial 0.18 mm complementary metal oxide semiconductor (CMOS) process without any post-process. The finite element method (FEM) software Sentaurus TCAD...

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Bibliographic Details
Main Authors: Jian-Zhi Tseng, Chyan-Chyi Wu, Ching-Liang Dai
Format: Article
Language:English
Published: MDPI AG 2014-04-01
Series:Sensors
Subjects:
magnetic sensor
magneto-transistor
CMOS
Online Access:http://www.mdpi.com/1424-8220/14/4/6722

Internet

http://www.mdpi.com/1424-8220/14/4/6722

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