Effect of Zirconium Doping on Electrical Properties of Aluminum Oxide Dielectric Layer by Spin Coating Method with Low Temperature Preparation
In recent years, significant efforts have been devoted to the research and development of spin-coated Al<sub>2</sub>O<sub>3</sub> thin films, due to their large band gaps, high breakdown voltage and stability at high annealing temperature. However, as the alumina precursor ha...
| Main Authors: | , , , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2020-06-01
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| Series: | Coatings |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2079-6412/10/7/620 |