A Methodology for Predictive Maintenance in Semiconductor Manufacturing
In order to occupy a competitive position in semiconductor industry the most important challenges a fabrication plant has to face are the reduction of manufacturing costs and the increase of production yield. Predictive maintenance is one possible way to address these challenges. In this paper we p...
| Main Authors: | , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
Austrian Statistical Society
2016-02-01
|
| Series: | Austrian Journal of Statistics |
| Online Access: | http://www.ajs.or.at/index.php/ajs/article/view/171 |