High-Precision Fabrication of Micro Monolithic Tungsten Ball Tips via Arc Discharge and the Taguchi Method
A micro ball tip is a core component of high precision coordinate measuring machines. The present micro ball tips cannot satisfy the high-precision measuring requirements of high aspect ratio microstructures due to their large diameter and low accuracy. In the previous study, we fabricated a micro m...
| Main Authors: | , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2021-08-01
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| Series: | Micromachines |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2072-666X/12/9/1042 |