High-Precision Fabrication of Micro Monolithic Tungsten Ball Tips via Arc Discharge and the Taguchi Method
A micro ball tip is a core component of high precision coordinate measuring machines. The present micro ball tips cannot satisfy the high-precision measuring requirements of high aspect ratio microstructures due to their large diameter and low accuracy. In the previous study, we fabricated a micro m...
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doaj-d51e1381276847d79fd90e0518b764872021-09-26T00:42:36ZengMDPI AGMicromachines2072-666X2021-08-01121042104210.3390/mi12091042High-Precision Fabrication of Micro Monolithic Tungsten Ball Tips via Arc Discharge and the Taguchi MethodZhen-Ying Cheng0Pan Yao1Yong-Jun Wang2Chen Chen3Li-Juan Chen4Rui-Jun Li5Qiang-Xian Huang6School of Instrument Science and Optoelectronic Engineering, Hefei University of Technology, Hefei 230009, ChinaSchool of Instrument Science and Optoelectronic Engineering, Hefei University of Technology, Hefei 230009, ChinaSchool of Instrument Science and Optoelectronic Engineering, Hefei University of Technology, Hefei 230009, ChinaSchool of Instrument Science and Optoelectronic Engineering, Hefei University of Technology, Hefei 230009, ChinaSchool of Instrument Science and Optoelectronic Engineering, Hefei University of Technology, Hefei 230009, ChinaSchool of Instrument Science and Optoelectronic Engineering, Hefei University of Technology, Hefei 230009, ChinaSchool of Instrument Science and Optoelectronic Engineering, Hefei University of Technology, Hefei 230009, ChinaA micro ball tip is a core component of high precision coordinate measuring machines. The present micro ball tips cannot satisfy the high-precision measuring requirements of high aspect ratio microstructures due to their large diameter and low accuracy. In the previous study, we fabricated a micro monolithic tungsten ball tip by using arc discharge and surface tension principles. However, the fabrication success rate of forming a micro ball tip is less than 10%. In the present study, the Taguchi method has been applied to increase the fabrication success rate, and it has increased to 57.5%. The output response is evaluated in terms of the diameter, roundness, and center offset of the tungsten probe ball tips. The smaller-the-better signal-to-noise ratio is applied to analyze the influence of various parameters. The proposed parameters can be used to increase the fabrication success rate and accuracy of the monolithic probe ball tip.https://www.mdpi.com/2072-666X/12/9/1042tungsten ball tiparc dischargeTaguchi methodprocess parameters |
collection |
DOAJ |
language |
English |
format |
Article |
sources |
DOAJ |
author |
Zhen-Ying Cheng Pan Yao Yong-Jun Wang Chen Chen Li-Juan Chen Rui-Jun Li Qiang-Xian Huang |
spellingShingle |
Zhen-Ying Cheng Pan Yao Yong-Jun Wang Chen Chen Li-Juan Chen Rui-Jun Li Qiang-Xian Huang High-Precision Fabrication of Micro Monolithic Tungsten Ball Tips via Arc Discharge and the Taguchi Method Micromachines tungsten ball tip arc discharge Taguchi method process parameters |
author_facet |
Zhen-Ying Cheng Pan Yao Yong-Jun Wang Chen Chen Li-Juan Chen Rui-Jun Li Qiang-Xian Huang |
author_sort |
Zhen-Ying Cheng |
title |
High-Precision Fabrication of Micro Monolithic Tungsten Ball Tips via Arc Discharge and the Taguchi Method |
title_short |
High-Precision Fabrication of Micro Monolithic Tungsten Ball Tips via Arc Discharge and the Taguchi Method |
title_full |
High-Precision Fabrication of Micro Monolithic Tungsten Ball Tips via Arc Discharge and the Taguchi Method |
title_fullStr |
High-Precision Fabrication of Micro Monolithic Tungsten Ball Tips via Arc Discharge and the Taguchi Method |
title_full_unstemmed |
High-Precision Fabrication of Micro Monolithic Tungsten Ball Tips via Arc Discharge and the Taguchi Method |
title_sort |
high-precision fabrication of micro monolithic tungsten ball tips via arc discharge and the taguchi method |
publisher |
MDPI AG |
series |
Micromachines |
issn |
2072-666X |
publishDate |
2021-08-01 |
description |
A micro ball tip is a core component of high precision coordinate measuring machines. The present micro ball tips cannot satisfy the high-precision measuring requirements of high aspect ratio microstructures due to their large diameter and low accuracy. In the previous study, we fabricated a micro monolithic tungsten ball tip by using arc discharge and surface tension principles. However, the fabrication success rate of forming a micro ball tip is less than 10%. In the present study, the Taguchi method has been applied to increase the fabrication success rate, and it has increased to 57.5%. The output response is evaluated in terms of the diameter, roundness, and center offset of the tungsten probe ball tips. The smaller-the-better signal-to-noise ratio is applied to analyze the influence of various parameters. The proposed parameters can be used to increase the fabrication success rate and accuracy of the monolithic probe ball tip. |
topic |
tungsten ball tip arc discharge Taguchi method process parameters |
url |
https://www.mdpi.com/2072-666X/12/9/1042 |
work_keys_str_mv |
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