Machine-learning-assisted thin-film growth: Bayesian optimization in molecular beam epitaxy of SrRuO3 thin films

Materials informatics exploiting machine learning techniques, e.g., Bayesian optimization (BO), have the potential to reduce the number of thin-film growth runs for optimization of thin-film growth conditions through incremental updates of machine learning models in accordance with newly measured da...

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Bibliographic Details
Main Authors: Yuki K. Wakabayashi, Takuma Otsuka, Yoshiharu Krockenberger, Hiroshi Sawada, Yoshitaka Taniyasu, Hideki Yamamoto
Format: Article
Language:English
Published: AIP Publishing LLC 2019-10-01
Series:APL Materials
Online Access:http://dx.doi.org/10.1063/1.5123019