Tuning material properties of amorphous zinc oxynitride thin films by magnesium addition
The amorphous n-type multi-cation and multi-anion compound zinc magnesium oxynitride was fabricated by reactive long-throw magnetron co-sputtering from a metallic zinc and a metallic magnesium target. We achieved magnesium cation compositions in the thin films between 1 at. % and 7.5 at. % by varyin...
| Main Authors: | , , , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2021-02-01
|
| Series: | APL Materials |
| Online Access: | http://dx.doi.org/10.1063/5.0035147 |