Analysis the scatter parameter of SOI RF switch with different design structure

Based on commercial 0.2 μm SOI RF process platform, the influence of stack, width, bias resistance and bias voltage on scatter parameter characteristics of test structure for SOI RF switch application is investigated, including series branch, shunt branch, single-pole-single-throw, and single-pole-d...

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Bibliographic Details
Main Authors: Xin Haiwei, Liu Zhangli
Format: Article
Language:zho
Published: National Computer System Engineering Research Institute of China 2019-02-01
Series:Dianzi Jishu Yingyong
Subjects:
SOI
IL
Online Access:http://www.chinaaet.com/article/3000097346