High Temperature Behavior of RuAl Thin Films on Piezoelectric CTGS and LGS Substrates

High Temperature Behavior of RuAl Thin Films on Piezoelectric CTGS and LGS Substrates

This paper reports on a significant further improvement of the high temperature stability of RuAl thin films (110 nm) on the piezoelectric Ca<inline-formula> <math display="inline"> <semantics> <msub> <mrow></mrow> <mn>3</mn> </msub> &l...

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Bibliographic Details
Main Author: Marietta Seifert
Format: Article
Language:English
Published: MDPI AG 2020-04-01
Series:Materials
Subjects:
SAW sensors
interdigital transducer material
high temperature stability
RuAl
thin films
CTGS
Online Access:https://www.mdpi.com/1996-1944/13/7/1605

Internet

https://www.mdpi.com/1996-1944/13/7/1605

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