Critical relative indentation depth in carbon based thin films

Critical relative indentation depth in carbon based thin films

The thin film hardness estimation by nanoindentation is influenced by substrate beyond a critical relative indentation depth (CRID). In this study we developed a methodology to identify the CRID in amorphous carbon film. Three types of amorphous carbon film deposited on silicon have been studied. Th...

Full description

Bibliographic Details
Main Authors: Ruben Bartali, Alessandro Vaccari, Victor Micheli, Gloria Gottardi, Rajesh Pandiyan, Amos Collini, Paolo Lori, Gianni Coser, Nadhira Laidani
Format: Article
Language:English
Published: Elsevier 2014-06-01
Series:Progress in Natural Science: Materials International
Subjects:
Nanoindentation
Carbon film
Critical relative indentation depth
We/Wt
Online Access:http://www.sciencedirect.com/science/article/pii/S100200711400046X

Internet

http://www.sciencedirect.com/science/article/pii/S100200711400046X

Similar Items