Monolithic Wafer Scale Integration of Silicon Nanoribbon Sensors with CMOS for Lab-on-Chip Application

Monolithic Wafer Scale Integration of Silicon Nanoribbon Sensors with CMOS for Lab-on-Chip Application

Silicon ribbons (SiRi) have been well-established as highly sensitive transducers for biosensing applications thanks to their high surface to volume ratio. However, selective and multiplexed detection of biomarkers remains a challenge. Further, very few attempts have been made to integrate SiRi with...

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Bibliographic Details
Main Authors: Ganesh Jayakumar, Per-Erik Hellström, Mikael Östling
Format: Article
Language:English
Published: MDPI AG 2018-10-01
Series:Micromachines
Subjects:
silicon ribbon pixel
silicon ribbon biosensor
lab-on-chip
SiRi CMOS integration
selective multiplexed detection
SiRi frontgate mode
SiRi backgate mode
Online Access:https://www.mdpi.com/2072-666X/9/11/544

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https://www.mdpi.com/2072-666X/9/11/544

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