Deposition of Silicon-Based Stacked Layers for Flexible Encapsulation of Organic Light Emitting Diodes

Deposition of Silicon-Based Stacked Layers for Flexible Encapsulation of Organic Light Emitting Diodes

In this study, inorganic silicon oxide (SiO<i><sub>x</sub></i>)/organic silicon (SiC<i><sub>x</sub></i>H<i><sub>y</sub></i>) stacked layers were deposited by a radio frequency inductively coupled plasma chemical vapor deposition...

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Bibliographic Details
Main Authors: Chia-Hsun Hsu, Yang-Shih Lin, Hsin-Yu Wu, Xiao-Ying Zhang, Wan-Yu Wu, Shui-Yang Lien, Dong-Sing Wuu, Yeu-Long Jiang
Format: Article
Language:English
Published: MDPI AG 2019-07-01
Series:Nanomaterials
Subjects:
encapsulation
organic silicon
inorganic silicon
organic light emitting diode
Online Access:https://www.mdpi.com/2079-4991/9/7/1053

Internet

https://www.mdpi.com/2079-4991/9/7/1053

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