Application of a Force Sensor in Wire Bonding Process
Wire bonder is important equipment in semiconductor end-package. The benefits of using force sensor are precisely force control and earlier contact detection. In this paper, we introduced an application of a force sensor in the wire bonding process. We proposed the control strategy of the whole bond...
Main Authors: | , , , |
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Format: | Article |
Language: | English |
Published: |
IFSA Publishing, S.L.
2013-11-01
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Series: | Sensors & Transducers |
Subjects: | |
Online Access: | http://www.sensorsportal.com/HTML/DIGEST/november_2013/PDF_vol_159/P_RP_0013.pdf |