Application of a Force Sensor in Wire Bonding Process

Wire bonder is important equipment in semiconductor end-package. The benefits of using force sensor are precisely force control and earlier contact detection. In this paper, we introduced an application of a force sensor in the wire bonding process. We proposed the control strategy of the whole bond...

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Bibliographic Details
Main Authors: Lei Zhou, Jiangang Li, Lanhui Fu, Zexiang Li
Format: Article
Language:English
Published: IFSA Publishing, S.L. 2013-11-01
Series:Sensors & Transducers
Subjects:
Online Access:http://www.sensorsportal.com/HTML/DIGEST/november_2013/PDF_vol_159/P_RP_0013.pdf