On the Spatial Uniformity of the Degree of Ionization in a Helium ECR Plasma Produced under a Simple Cusp Field
Production of a plasma that has a large degree of ionization (DOI), volume, and spatial and temporal uniformities is a challenge for the improvement of the performance of plasma-based vapor deposition processes. As a potential candidate for the discharge, we investigate plasma parameters arising in...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2019-05-01
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| Series: | Atoms |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2218-2004/7/2/49 |