Study of Sputtered ZnO:Ga<sub>2</sub>O<sub>3</sub> Films for Energy Harvesting Applications

Study of Sputtered ZnO:Ga<sub>2</sub>O<sub>3</sub> Films for Energy Harvesting Applications

Thin films of ZnO:Ga<sub>2</sub>O<sub>3</sub> (ZGO) were deposited by radio frequency (RF) sputtering at voltages of 0.5, 0.9 and 1.1 kV. The films were studied with respect to their suitability in flexible piezoelectric nanogenerators. The analysis of the spectroscopic and m...

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Bibliographic Details
Main Authors: Mariya Aleksandrova, Tatyana Ivanova, Frank Hamelmann, Velichka Strijkova, Kostadinka Gesheva
Format: Article
Language:English
Published: MDPI AG 2020-07-01
Series:Coatings
Subjects:
energy harvesting
piezoelectric oxide
RF sputtering
flexible substrate
ZnO:Ga<sub>2</sub>O<sub>3</sub> films
Online Access:https://www.mdpi.com/2079-6412/10/7/650

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https://www.mdpi.com/2079-6412/10/7/650

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