Continuum models of focused electron beam induced processing

Continuum models of focused electron beam induced processing

Focused electron beam induced processing (FEBIP) is a suite of direct-write, high resolution techniques that enable fabrication and editing of nanostructured materials inside scanning electron microscopes and other focused electron beam (FEB) systems. Here we detail continuum techniques that are use...

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Bibliographic Details
Main Authors: Milos Toth, Charlene Lobo, Vinzenz Friedli, Aleksandra Szkudlarek, Ivo Utke
Format: Article
Language:English
Published: Beilstein-Institut 2015-07-01
Series:Beilstein Journal of Nanotechnology
Subjects:
continuum model
deposition
electron beam processing
etching
gas injection system
Online Access:https://doi.org/10.3762/bjnano.6.157

Internet

https://doi.org/10.3762/bjnano.6.157

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