CO2 Sensing Characteristics of a La2O3/SnO2 Stacked Structure with Micromachined Hotplates
Demand for the detection of carbon dioxide (CO 2 ) is increasing in various fields, including air-quality monitoring, healthcare, and agriculture. On the other hand, smart gas sensors, in which micromachined gas sensors are integrated with driving circuits, are desirable toward the developmen...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2017-09-01
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| Series: | Sensors |
| Subjects: | |
| Online Access: | https://www.mdpi.com/1424-8220/17/9/2156 |