Plasma Enhanced Chemical Vapor Deposition of Organic Polymers
Chemical Vapor Deposition (CVD) with its plasma-enhanced variation (PECVD) is a mighty instrument in the toolbox of surface refinement to cover it with a layer with very even thickness. Remarkable the lateral and vertical conformity which is second to none. Originating from the evaporation of elemen...
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| Format: | Article |
| Language: | English |
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MDPI AG
2021-06-01
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| Series: | Processes |
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| Online Access: | https://www.mdpi.com/2227-9717/9/6/980 |