Optoelectronic Properties and the Electrical Stability of Ga-Doped ZnO Thin Films Prepared via Radio Frequency Sputtering

In this work, Ga-doped ZnO (GZO) thin films were deposited via radio frequency sputtering at room temperature. The influence of the Ga content on the film’s optoelectronic properties as well as the film’s electrical stability were investigated. The results showed that the film’s crystallinity degrad...

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Bibliographic Details
Main Authors: Shien-Uang Jen, Hui Sun, Hai-Pang Chiang, Sheng-Chi Chen, Jian-Yu Chen, Xin Wang
Format: Article
Language:English
Published: MDPI AG 2016-12-01
Series:Materials
Subjects:
Online Access:http://www.mdpi.com/1996-1944/9/12/987