Improvement of Photovoltaic Cells Efficiency by Reducing Contamination in Single Chamber PECVD System by Passivation with a-Si:H and μc-Si:H Thin Films
High performance solar cells, deposited in a single chamber, can be obtained when low levels of contamination exists for the p-,i-,n- layers. This is a recurrent problem not only in the laboratories, but also in the industrial single chamber plasma enhanced chemical vapour deposition (PECVD) system...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Galati University Press
2011-12-01
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| Series: | The Annals of “Dunarea de Jos” University of Galati. Fascicle IX, Metallurgy and Materials Science |
| Subjects: | |
| Online Access: | https://www.gup.ugal.ro/ugaljournals/index.php/mms/article/view/2921 |