Structural changes induced by argon ion irradiation in TiN thin films
In this work, the effects of 120 keV Ar+ ion implantation on the structural properties of TiN thin films were investigated. TiN layers were deposited by d.c. reactive sputtering on Si(100) wafers at room temperature or at 150°C. The thickness of TiN layers was ~240 nm. After deposition the samples w...
Main Authors: | , , , |
---|---|
Format: | Article |
Language: | English |
Published: |
University of Novi Sad
2011-03-01
|
Series: | Processing and Application of Ceramics |
Subjects: | |
Online Access: | http://www.tf.uns.ac.rs/publikacije/PAC/pdf/PAC%2011%2003.pdf |
id |
doaj-dc9f3939725e4c5f8759a8d53940e662 |
---|---|
record_format |
Article |
spelling |
doaj-dc9f3939725e4c5f8759a8d53940e6622020-11-24T22:51:26ZengUniversity of Novi SadProcessing and Application of Ceramics1820-61312011-03-01511923Structural changes induced by argon ion irradiation in TiN thin filmsMaja PopovićMirjana NovakovićZlatko RakočevićNataša BibićIn this work, the effects of 120 keV Ar+ ion implantation on the structural properties of TiN thin films were investigated. TiN layers were deposited by d.c. reactive sputtering on Si(100) wafers at room temperature or at 150°C. The thickness of TiN layers was ~240 nm. After deposition the samples were irradiated with 120 keV argon ions to the fluencies of 1×10^15 and 1×10^16 ions/cm2. Structural characterisation was performed with Rutherford backscattering spectroscopy (RBS), cross-sectional transmission electron microscopy (XTEM), grazing angle X-ray diffraction (XRD) and atomic force microscopy (AFM). It was found that the argon ion irradiation induced the changes in the lattice constant, mean grain size, micro-strain and surface morphology of the TiN layers. The observed micro-structural changes are due to the formation of the high density damage region in the TiN thin film structure.http://www.tf.uns.ac.rs/publikacije/PAC/pdf/PAC%2011%2003.pdfTiNIon implantationTEMAFM |
collection |
DOAJ |
language |
English |
format |
Article |
sources |
DOAJ |
author |
Maja Popović Mirjana Novaković Zlatko Rakočević Nataša Bibić |
spellingShingle |
Maja Popović Mirjana Novaković Zlatko Rakočević Nataša Bibić Structural changes induced by argon ion irradiation in TiN thin films Processing and Application of Ceramics TiN Ion implantation TEM AFM |
author_facet |
Maja Popović Mirjana Novaković Zlatko Rakočević Nataša Bibić |
author_sort |
Maja Popović |
title |
Structural changes induced by argon ion irradiation in TiN thin films |
title_short |
Structural changes induced by argon ion irradiation in TiN thin films |
title_full |
Structural changes induced by argon ion irradiation in TiN thin films |
title_fullStr |
Structural changes induced by argon ion irradiation in TiN thin films |
title_full_unstemmed |
Structural changes induced by argon ion irradiation in TiN thin films |
title_sort |
structural changes induced by argon ion irradiation in tin thin films |
publisher |
University of Novi Sad |
series |
Processing and Application of Ceramics |
issn |
1820-6131 |
publishDate |
2011-03-01 |
description |
In this work, the effects of 120 keV Ar+ ion implantation on the structural properties of TiN thin films were investigated. TiN layers were deposited by d.c. reactive sputtering on Si(100) wafers at room temperature or at 150°C. The thickness of TiN layers was ~240 nm. After deposition the samples were irradiated with 120 keV argon ions to the fluencies of 1×10^15 and 1×10^16 ions/cm2. Structural characterisation was performed with Rutherford backscattering spectroscopy (RBS), cross-sectional transmission electron microscopy (XTEM), grazing angle X-ray diffraction (XRD) and atomic force microscopy (AFM). It was found that the argon ion irradiation induced the changes in the lattice constant, mean grain size, micro-strain and surface morphology of the TiN layers. The observed micro-structural changes are due to the formation of the high density damage region in the TiN thin film structure. |
topic |
TiN Ion implantation TEM AFM |
url |
http://www.tf.uns.ac.rs/publikacije/PAC/pdf/PAC%2011%2003.pdf |
work_keys_str_mv |
AT majapopovic structuralchangesinducedbyargonionirradiationintinthinfilms AT mirjananovakovic structuralchangesinducedbyargonionirradiationintinthinfilms AT zlatkorakocevic structuralchangesinducedbyargonionirradiationintinthinfilms AT natasabibic structuralchangesinducedbyargonionirradiationintinthinfilms |
_version_ |
1725669696717455360 |